- US12506003utility2025Semiconductor Substrate with Nitride Interface Layer0 cites
- US12365980utility2025Apparatus, Method, and Recording Medium Storing Command for Controlling Thin-film Deposition Process0 cites
- US11990335utility2024N-co-doped Semiconductor Substrate0 cites
- US11597997utility2023Apparatus, Method, and Recording Medium Storing Command for Controlling Thin-film Deposition Process0 cites