Patents/Assignees

HORIBA STEC, Co., Ltd.

54 patents in portfolio

US11789435utility2023
Flow Control Device, Diagnostic Method, and Program for Flow Control Device
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US11789472utility2023
Gas Delivery System with Electrical Backplane
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US11761547utility2023
Valve Orifice Insert
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US11709080utility2023
Flow Rate Estimation for Mass Flow Controller
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US11698649utility2023
Vaporization System and Concentration Control Module Used in the Same
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US11686603utility2023
Pressure Type Flowmeter and Fluid Control Device
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US11680646utility2023
Fluid Control Valve, Fluid Control Device, Valve Element, and Method of Manufacturing Valve Element
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US11644354utility2023
Flow Rate Sensor Correction Device, Flow Rate Sensor, Flow Rate Control Device, Program Recording Medium on Which Is Recorded a Program for a Correction Device, and Correction Method
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US11644357utility2023
Flow Rate Diagnosis Apparatus, Flow Rate Diagnosis Method, and Storage Medium Storing Thereon Program for Flow Rate Diagnosis Apparatus
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US11644852utility2023
Flow Rate Ratio Control System, Film Forming System, Abnormality Diagnosis Method, and Abnormality Diagnosis Program Medium
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US11631596utility2023
Concentration Control Apparatus, Source Consumption Quantity Estimation Method, and Program Recording Medium on Which a Program for a Concentration Control Apparatus Is Recorded
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US11608910utility2023
Piezo Valve, Fluid Control Device and Piezo Valve Diagnosis Method
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US11609146utility2023
Fluid Control Apparatus, Diagnostic Method and Program Record Medium for Recording Programs of Fluid Control Apparatus
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US11567476utility2023
Computing System with Discriminative Classifier for Determining Similarity of a Monitored Gas Delivery Process
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