Patents/Assignees

EVATEC AG

14 patents in portfolio

US12604700utility2026
Vacuum Treatment Apparatus and Methods for Manufacturing Vacuum Treated Substrates
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US12595550utility2026
Vacuum Layer Deposition Apparatus and Method of Depositing a Layer on a Substrate, Especially on a Substrate Comprising Indentations in the Surface to Be Coated
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US12493016utility2025
Measuring Device and Method for Measuring Parameters of a Piezoelectric Crystal Onto Which a Thin Film of Material Is Deposited as Well as Thin-film Deposition Systems with Such a Device and a Method for Controlling Such Systems
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US12426506utility2025
Piezoelectric Coating and Deposition Process
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US12389797utility2025
Deposition Process for Piezoelectric Coatings
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US12272525utility2025
Sputtering Apparatus for Coating of 3d-objects
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US12249523utility2025
Wafer Holder and Temperature Conditioning Arrangement and Method of Manufacturing a Wafer
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US12209302utility2025
Vacuum System and Method to Deposit a Compound Layer
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US12211715utility2025
Substrate Vacuum Treatment Apparatus and Method Therefor
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US11952654utility2024
Liquid Sputter Target
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US11848179utility2023
Methods of and Apparatus for Magnetron Sputtering
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US11776825utility2023
Chamber for Degassing Substrates
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US11742187utility2023
RF Capacitive Coupled Etch Reactor
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US11551950utility2023
Substrate Processing Apparatus and Method of Processing a Substrate and of Manufacturing a Processed Workpiece
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