- US12598955utility2026Substrate Transfer Device and Substrate Processing Apparatus Having the Same0 cites
- US12555755utility2026Batch Type Substrate Processing Apparatus0 cites
- US12488963utility2025Substrate Processing Apparatus0 cites
- US12392554utility2025Apparatus for Processing a Substrate and Method of Operating the Same0 cites
- US12354850utility2025Apparatus and Method for Processing Substrate0 cites
- US12243724utility2025Batch Type Substrate Processing Apparatus0 cites
- US12243767utility2025Substrate Support Assembly and Substrate Processing Apparatus0 cites
- US11972946utility2024Method for Removing Impurities in Thin Film and Substrate Processing Apparatus0 cites
- US11702737utility2023Batch-type Substrate Processing Apparatus and Operation Method Thereof0 cites