Patents/Assignees

EGTM Co., Ltd.

6 patents in portfolio

US12421605utility2025
Method for Areal Selective Forming of Thin Film
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US12281130utility2025
Organometallic Precursor Compound
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US12252781utility2025
Area-selective Method for Forming Thin Film by Using Nuclear Growth Retardation
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US12247289utility2025
Method for Forming Thin Film Using Surface Protection Material
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US11926897utility2024
Niobium Precursor Compound for Thin Film Deposition and Method for Forming Niobium-containing Thin Film Using Same
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US11634441utility2023
Group 5 Metal Compound for Thin Film Deposition and Method of Forming Group 5 Metal-containing Thin Film Using Same
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