Patents/Assignees

EBARA REFRIGERATION EQUIPMENT & SYSTEMS CO., Ltd.

6 patents in portfolio

US12381095utility2025
Subfab Area Installation Apparatus
0 cites
US12300520utility2025
Subfab Area Installation Apparatus
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US11796247utility2023
Temperature Control System
0 cites
US11788777utility2023
Temperature Control System and Integrated Temperature Control System
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US11703284utility2023
Temperature Control System and Integrated Temperature Control System
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US11656016utility2023
Cooling System That Comprises Multiple Cooling Apparatus and Reduces Power Consumption
0 cites