Patents/Assignees

EBARA CORPORATION

289 patents in portfolio

US12541190utility2026
Method and Computer Program Product for Identifying Element Which Limits Throughput of Plating Apparatus
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US12528150utility2026
Polishing Apparatus and Polishing Method
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US12532694utility2026
Substrate Cleaning Device and Substrate Processing Device
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US12510081utility2025
Pump Casing and Pump
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US12510349utility2025
Method of Detecting Abnormality in Measuring of Film Thickness of Workpiece, Optical Film-thickness Measuring Apparatus, and Storage Medium Storing Program
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US12504273utility2025
Measuring Film-thickness of a Workpiece in a Semiconductor Processing Apparatus Using a Composite Spectrum
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US12496677utility2025
Polishing Apparatus and Polishing Method
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US12485516utility2025
Substrate Cleaning Apparatus, Polishing Apparatus, Buffing Apparatus, Substrate Cleaning Method, Substrate Processing Apparatus, and Machine Learning Apparatus
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US12480221utility2025
Pre-wet Process Method
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USD1102398design2025
Seal for Chemical Mechanical Polishing Device
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US12472601utility2025
Method of Checking Leakage of Fluid and Polishing Apparatus
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US12459039utility2025
AM Apparatus for Manufacturing a Fabricated Object and Method for Testing an Irradiation Position of a Beam in the AM Apparatus
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US12463062utility2025
Substrate Processing Apparatus, Computer-readable Storage Medium Storing a Program, and Substrate Processing Method
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US12454978utility2025
Magnetic Bearing Apparatus with Axial Pole Segments
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US12447449utility2025
Chemical Supply Apparatus, Cleaning System, and Chemical Supply Method
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US12442102utility2025
Apparatus for Plating and Method of Plating
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US12429327utility2025
Method of Producing a Model for Estimating Film Thickness of Workpiece, Method of Estimating Film Thickness of Workpiece Using Such a Model, and Computer Readable Storage Medium Storing Program for Causing Computer to Perform the Methods
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US12429058utility2025
Purge Apparatus and Purge Method
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US12430092utility2025
Display System with a Rotary Machine and Drive Machine
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US12420378utility2025
Substrate Processing Apparatus and Method for Controlling Dressing of Polishing Member
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