Patents/Assignees

EBARA CORPORATION

289 patents in portfolio

US11676837utility2023
Substrate Holder
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US11667008utility2023
Substrate Processing Apparatus and Substrate Processing Method
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US11667007utility2023
Polishing Apparatus and Polishing Method
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US11668018utility2023
Contact Structure, Substrate Holder, Apparatus for Plating, and Method of Feeding Electric Power to Substrate
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US11662397utility2023
Electromagnet Control Device and Electromagnet System
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US11660643utility2023
Substrate Cleaning Device and Substrate Cleaning Method
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US11661669utility2023
Substrate Processing System, Controller and Method Using Test Operation Without Substrate
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US11664252utility2023
Cleaning Device, Polishing Device, and Device and Method for Calculating Rotation Speed of Substrate in Cleaning Device
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US11654524utility2023
Method of Detecting Abnormality of a Roller Which Transmits a Local Load to a Retainer Ring, and Polishing Apparatus
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US11658058utility2023
Substrate Holding Apparatus
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US11648643utility2023
Method, Apparatus, and System for Determining Optimum Operation Recipe for Optical Film-thickness Measuring Device
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US11648515utility2023
Gas Solution Manufacturing Device
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US11648638utility2023
Substrate Polishing Apparatus and Polishing Liquid Discharge Method in Substrate Polishing Apparatus
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US11642751utility2023
Polishing Method and Polishing Apparatus
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US11642704utility2023
Roll-type Processing Member, Pencil-type Processing Member, and Substrate Processing Apparatus Including Any One of These
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US11642753utility2023
Polishing-pad Laminated Structure, Polishing-pad Positioning Instrument, and Method of Attaching a Polishing Pad to a Polishing Table
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US11642755utility2023
Apparatus for Polishing and Method for Polishing
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US11638980utility2023
Laminated Membrane, Substrate Holder Including Laminated Membrane, and Substrate Processing Apparatus
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US11633828utility2023
Substrate Polishing System, Substrate Polishing Method and Substrate Polishing Apparatus
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US11626299utility2023
Cover for Swing Member of Substrate Processing Apparatus, Swing Member of Substrate Processing Apparatus, and Substrate Processing Apparatus
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