- US11833636utility2023Substrate Polishing Apparatus, Method of Creating Thickness Map, and Method of Polishing a Substrate0 cites
- US11833641utility2023Cleaning Method for Optical Surface Monitoring Device0 cites
- US11835047utility2023Pump Apparatus0 cites
- US11837477utility2023Washing Device and Washing Method0 cites
- US11837482utility2023Substrate Holding and Rotation Mechanism and Substrate Processing Apparatus0 cites
- USD1006057design2023Pump Casing0 cites
- US11826871utility2023Pad-temperature Regulating Apparatus, Pad-temperature Regulating Method, and Polishing Apparatus0 cites
- US11817311utility2023Substrate Cleaning Method and Substrate Cleaning Apparatus0 cites
- US11806828utility2023Polishing Apparatus and Calibration Method0 cites
- US11804398utility2023Workpiece Supporting Apparatus and Workpiece Supporting Method0 cites
- US11788543utility2023Impeller, Pump Having the Impeller, and Method of Producing the Impeller0 cites
- US11773504utility2023Plating Support System, Plating Support Device, and Recording Medium0 cites
- US11766756utility2023Substrate Support Apparatus and Substrate Cleaning Apparatus0 cites
- US11759912utility2023Magnetic Element and Eddy Current Sensor Using the Same0 cites
- US11759913utility2023Polishing Method and Polishing Apparatus0 cites
- US11752590utility2023Polishing Head and Polishing Apparatus0 cites
- US11745306utility2023Polishing Apparatus and Method of Controlling Inclination of Stationary Ring0 cites
- US11731233utility2023Eddy Current Detection Device and Polishing Apparatus0 cites