Patents/Assignees

Carl Zeiss SMT GmbH

189 patents in portfolio

US12153353utility2024
Drive Device, Optical System and Lithography Apparatus
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US12148139utility2024
Methods and Evaluation Devices for Analyzing Three-dimensional Data Sets Representing Devices
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US12140877utility2024
Method for Avoiding a Degradation of an Optical Element, Projection System, Illumination System and Projection Exposure Apparatus
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US12135211utility2024
Device for Measuring a Substrate and Method for Correcting Cyclic Error Components of an Interferometer
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US12135540utility2024
Devices and Methods for Examining And/or Processing an Element for Photolithography
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US12130557utility2024
Optical System and Lithography Apparatus
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US12117731utility2024
Method for Producing a Mirror of a Microlithographic Projection Exposure Apparatus
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US12111578utility2024
Mirror for an Illumination Optical Unit of a Projection Exposure Apparatus Comprising a Spectral Filter in the Form of a Grating Structure and Method for Producing a Spectral Filter in the Form of a Grating Structure on a Mirror
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US12111579utility2024
Method and Apparatus for Evaluating an Unknown Effect of Defects of an Element of a Photolithography Process
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US12105415utility2024
Method, Apparatus and Computer Program for Analyzing And/or Processing of a Mask for Lithography
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US12105427utility2024
Method and Device for Correcting a Telecentricity Error of an Imaging Device
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US12105429utility2024
Optical System with an Aperture Stop
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US12105434utility2024
Assembly, in Particular in a Microlithographic Projection Exposure Apparatus
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US12085780utility2024
Optical System, Heating Arrangement, and Method for Heating an Optical Element in an Optical System
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US12056865utility2024
Wafer-tilt Determination for Slice-and-image Process
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US12044638utility2024
System to Inspect, Modify or Analyze a Region of Interest of a Sample by Charged Particles, Set of Systems to Inspect, Modify or Analyze a Region of Interest of a Sample and Method to Inspect, Modify or Analyze a Region of Interest of a Sample by Charged Particles
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US12045969utility2024
Automated Root Cause Analysis for Defect Detection During Fabrication Processes of Semiconductor Structures
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US12038695utility2024
Protection Device for Lines in a Projection Printing Installation for Semiconductor Lithography
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US12040103utility2024
Imaging Optical Arrangement to Image an Object Illuminated by X-rays
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US12025818utility2024
Optical Element Having a Coating for Influencing Heating Radiation and Optical Arrangement
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