- US12339589utility2025Digital Micromirror Device for an Illumination Optical Component of a Projection Exposure System0 cites
- US12332043utility2025Measurement Method for Interferometrically Determining a Surface Shape0 cites
- US12326663utility2025Optical Component0 cites
- US12321105utility2025Projection Exposure Apparatus for Semiconductor Lithography0 cites
- US12313978utility2025Optical Assembly, Projection Exposure Apparatus and Method0 cites
- US12306539utility2025Optical Element, EUV Lithography System, and Method for Forming Nanoparticles0 cites
- US12306551utility2025Projection Exposure Apparatus Having a Device for Determining the Concentration of Atomic Hydrogen0 cites
- US12298674utility2025Connecting Components of an Optical Imaging Device0 cites
- US12300959utility2025Optical Assembly for Reducing a Spectral Bandwidth of an Output Beam of a Laser0 cites
- US12292281utility2025Method and Device for Characterizing the Surface Shape of an Optical Element0 cites
- US12292680utility2025Method and Apparatuses for Disposing of Excess Material of a Photolithographic Mask0 cites
- US12292690utility2025Insert for a Source Chamber of an EUV Radiation Source0 cites
- US12287587utility2025Damping Arrangement for Vibration Damping of an Element in an Optical System0 cites
- US12287588utility2025Method for Operating an EUV Lithography Apparatus, and EUV Lithography Apparatus0 cites