Patents/Assignees

Carl Zeiss SMT GmbH

189 patents in portfolio

US11561381utility2023
Catadioptric Lens and Optical System Comprising Such a Lens
0 cites
US11555783utility2023
Method for Detecting Particles on the Surface of an Object, Wafer, and Mask Blank
0 cites
US11550225utility2023
EUV Radiation Source, Insert for an EUV Radiation Source and Insert for an Insert for an EUV Radiation Source
0 cites
US8345219utility2013
Method and Apparatus for Setting an Illumination Optical Unit
0 cites
US8345222utility2013
High Transmission, High Aperture Catadioptric Projection Objective and Projection Exposure Apparatus
0 cites
US8345224utility2013
Methods and Devices for Driving Micromirrors
0 cites
US8345262utility2013
Method and Apparatus for Determining a Deviation of an Actual Shape from a Desired Shape of an Optical Surface
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US8345267utility2013
Apparatus for Microlithographic Projection Exposure and Apparatus for Inspecting a Surface of a Substrate
0 cites
US8345350utility2013
Chromatically Corrected Objective with Specifically Structured and Arranged Dioptric Optical Elements and Projection Exposure Apparatus Including the Same
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