Patents/Assignees

Carl Zeiss Multisem GmbH

23 patents in portfolio

US12609282utility2026
Multi-beam Charged Particle System and Method of Controlling the Working Distance in a Multi-beam Charged Particle System
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US12603245utility2026
Multiple Particle Beam System with a Contrast Correction Lens System
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US12586749utility2026
Certain Improvements of Multi-beam Generating and Multi-beam Deflecting Units
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US12512291utility2025
Particle Beam System Having a Multi-pole Lens Sequence for Independently Focusing a Multiplicity of Individual Particle Beams, and Its Use and Associated Method
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US12494343utility2025
Multiple Particle Beam Microscope and Associated Method with Fast Autofocus Around an Adjustable Working Distance
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US12488958utility2025
Method for Operating a Multi-beam Particle Beam Microscope
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US12431324utility2025
Multi-beam Digital Scan and Image Acquisition
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US12340973utility2025
Particle Beam System Including a Multi-beam Deflection Device and a Beam Stop, Method for Operating the Particle Beam System and Associated Computer Program Product
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US12300462utility2025
System Comprising a Multi-beam Particle Microscope and Method for Operating the Same
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US12293896utility2025
Particle Beam System
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US12283457utility2025
Multiple Particle Beam Microscope and Associated Method with an Improved Focus Setting Taking Into Account an Image Plane Tilt
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US12272519utility2025
Method for Area-wise Inspecting a Sample via a Multi-beam Particle Microscope, Computer Program Product and Multi-beam Particle Microscope for Semiconductor Sample Inspection, and Its Use
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US12255040utility2025
Multi-beam Particle Beam System and Method for Operating Same
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US12249478utility2025
Particle Beam System for Azimuthal Deflection of Individual Particle Beams and Method for Azimuth Correction in a Particle Beam System
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US12119204utility2024
Particle Beam System and the Use Thereof for Flexibly Setting the Current Intensity of Individual Particle Beams
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US12094683utility2024
Method for Operating a Multi-beam Particle Beam Microscope
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US12057290utility2024
Method for Operating a Multiple Particle Beam System While Altering the Numerical Aperture, Associated Computer Program Product and Multiple Particle Beam System
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US11935721utility2024
System Comprising a Multi-beam Particle Microscope and Method for Operating the Same
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US11735393utility2023
Method for Operating a Multi-beam Particle Beam Microscope
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US11657999utility2023
Particle Beam System and Method for the Particle-optical Examination of an Object
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