Patents/Assignees

CANON TOKKI CORPORATION

4 patents in portfolio

US12486560utility2025
Alignment Mechanism, Alignment Method, Film Forming Device and Film Forming Method
0 cites
US12463071utility2025
Deposition Apparatus, Electronic Device Manufacturing Apparatus, and Deposition Method
0 cites
US12354894utility2025
Alignment Apparatus, Deposition Apparatus, Electronic Device Manufacturing Apparatus, and Alignment Method
0 cites
US12116664utility2024
Transport Carrier, Deposition Apparatus, and Electronic Device Manufacturing Apparatus
0 cites