Patents/Assignees

Brooks Automation US, LLC

45 patents in portfolio

US11894253utility2024
Method and Apparatus for Substrate Alignment
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US11862498utility2024
Substrate Processing Apparatus
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US11830749utility2023
Substrate Transport Apparatus
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US11821953utility2023
Method and Apparatus for Brushless Electrical Machine Control
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US11823944utility2023
Substrate Processing Apparatus
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US11810801utility2023
Robot Embedded Vision Apparatus
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US11801598utility2023
Substrate Transport Apparatus with Multiple Movable Arms Utilizing a Mechanical Switch Mechanism
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US11799346utility2023
Sealed Robot Drive
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US11787058utility2023
Method and Apparatus for Health Assessment of a Transport Apparatus
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US11772261utility2023
Compact Direct Drive Spindle
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US11776834utility2023
On the Fly Automatic Wafer Centering Method and Apparatus
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US11764093utility2023
Automatic Wafer Centering Method and Apparatus
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US11691267utility2023
Substrate Processing Apparatus
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US11676845utility2023
Automated Teach Apparatus for Robotic Systems and Method Therefor
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US11670534utility2023
Transport Apparatus and Adapter Pendant
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US11664259utility2023
Process Apparatus with On-the-fly Substrate Centering
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US11658051utility2023
Substrate Transport
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US11650581utility2023
Intelligent Condition Monitoring and Fault Diagnostic System for Preventative Maintenance
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US11613002utility2023
Dual Arm Robot
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US11610787utility2023
Load Lock Fast Pump Vent
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