Patents/Assignees

BEIJING U-PRECISION TECH CO., Ltd.

5 patents in portfolio

US12393127utility2025
Exposure Light Beam Phase Measurement Method in Laser Interference Photolithography, and Photolithography System
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US12346030utility2025
Device and Method for Regulating and Controlling Incident Angle of Light Beam in Laser Interference Lithography
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US12332053utility2025
Heterodyne Grating Interferometry System Based on Secondary Diffraction
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US12038690utility2024
Laser Interference Photolithography System
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US11940349utility2024
Plane Grating Calibration System
0 cites