- US11710624utility2023Sputtering Method0 cites
- US11703839utility2023Material Processing Path Selection Method and Device0 cites
- US11705307utility2023Plasma System and Filter Device0 cites
- US11699541utility2023Magnetic Thin Film Laminated Structure Deposition Method0 cites
- US11694880utility2023Lift Thimble System, Reaction Chamber, and Semiconductor Processing Equipment0 cites
- US11626268utility2023Induction Coil Assembly and Reaction Chamber0 cites
- US11615942utility2023Control Method of Radiofrequency Source0 cites
← PreviousPage 4 of 4