Patents/Assignees

Beijing E-town Semiconductor Technology Co., Ltd.

7 patents in portfolio

US12120780utility2024
Nitrogen Injection for Arc Lamps
0 cites
US12080568utility2024
Support Plate for Localized Heating in Thermal Processing Systems
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US12027427utility2024
Preheat Processes for Millisecond Anneal System
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US12014920utility2024
Apparatus for Hydrogen Assisted Atmospheric Radical Oxidation
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US12002652utility2024
Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential
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US12002701utility2024
Electrostatic Chuck Assembly for Plasma Processing Apparatus
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US11586113utility2023
Methods and Apparatus for Post Exposure Bake Processing of a Workpiece
0 cites