Patents/Assignees

Axcelis Technologies, Inc.

24 patents in portfolio

US11670483utility2023
High Power Wafer Cooling
0 cites
US11646175utility2023
Method of Mixing Upstream and Downstream Current Measurements for Inference of the Beam Current at the Bend of an Optical Element for Realtime Dose Control
0 cites
US11545330utility2023
Ion Source with Multiple Bias Electrodes
0 cites
US8344337utility2013
Silaborane Implantation Processes
0 cites

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