Patents/Assignees

ASML Netherlands B.V.

728 patents in portfolio

US12461452utility2025
Electrostatic Clamp
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US12461457utility2025
Asymmetry Extended Grid Model for Wafer Alignment
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US12463010utility2025
Multiple Charged-particle Beam Apparatus and Methods
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US12460971utility2025
Wavelength Selection Module, Illumination System and Metrology System
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US12456001utility2025
Methods for Sample Scheme Generation and Optimization
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US12449726utility2025
Apparatus for Assembly of a Reticle Assembly
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US12449735utility2025
Sub-field Control of a Lithographic Process and Associated Apparatus
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US12451321utility2025
Apparatus for Obtaining Optical Measurements in a Charged Particle Apparatus
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US12451324utility2025
Leveling Sensor in Multiple Charged-particle Beam Inspection
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US12452986utility2025
Nozzle Apparatus
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US12442759utility2025
Contaminant Analyzing Metrology System, Lithographic Apparatus, and Methods Thereof
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US12443115utility2025
Measurement System and Method for Characterizing a Patterning Device
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US12444901utility2025
Seed Laser System for Radiation Source
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US12446141utility2025
Contamination Shield for Mechanically Insulating Device
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US12436454utility2025
Pellicle Membrane
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US12436470utility2025
Substrate Comprising a Target Arrangement, and Associated at Least One Patterning Device, Lithographic Method and Metrology Method
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US12436472utility2025
Cooling Hood for Reticle
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US12429328utility2025
Metrology Method, Target and Substrate
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US12429778utility2025
Fluid Handling System, Method and Lithographic Apparatus
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US12429781utility2025
Metrology Method and Associated Metrology and Lithographic Apparatuses
0 cites

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