Patents/Assignees

ASML Netherlands B.V.

728 patents in portfolio

US11784024utility2023
Multi-cell Detector for Charged Particles
0 cites
US11784098utility2023
Method and Apparatus to Determine a Patterning Process Parameter
0 cites
US11782351utility2023
Metrology Device and Detection Apparatus Therefor
0 cites
US11774012utility2023
Apparatus for High Pressure Connection
0 cites
US11774868utility2023
Image Sensor for Immersion Lithography
0 cites
US11774869utility2023
Method and System for Determining Overlay
0 cites
US11774671utility2023
Hollow-core Photonic Crystal Fiber Based Optical Component for Broadband Radiation Generation
0 cites
US11774828utility2023
Supercontinuum Radiation Source and Associated Metrology Devices
0 cites
US11774861utility2023
Calibration Method for a Lithographic System
0 cites
US11774857utility2023
Lithography Apparatus and Device Manufacturing Method
0 cites
US11774867utility2023
Radiation Measurement System
0 cites
US11774865utility2023
Method of Controlling a Position of a First Object Relative to a Second Object, Control Unit, Lithographic Apparatus and Apparatus
0 cites
US11775728utility2023
Methods for Sample Scheme Generation and Optimization
0 cites
US11774862utility2023
Method of Obtaining Measurements, Apparatus for Performing a Process Step, and Metrology Apparatus
0 cites
US11768441utility2023
Method for Controlling a Manufacturing Process and Associated Apparatuses
0 cites
US11768442utility2023
Method of Determining Control Parameters of a Device Manufacturing Process
0 cites
US11769317utility2023
Fully Automated SEM Sampling System for E-beam Image Enhancement
0 cites
US11768440utility2023
Training Methods for Machine Learning Assisted Optical Proximity Error Correction
0 cites
US11762304utility2023
Lithographic Apparatus
0 cites
US11764030utility2023
Stage Apparatus Suitable for Electron Beam Inspection Apparatus
0 cites

← PreviousPage 28 of 37Next →