Patents/Assignees

ASML Netherlands B.V.

728 patents in portfolio

US11875101utility2024
Method for Patterning Process Modelling
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US11875966utility2024
Method and Apparatus for Inspection
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USRE049784reissue2024
Apparatus of Plural Charged-particle Beams
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US11862427utility2024
Switch Matrix Design for Beam Image System
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US11861818utility2024
Cascade Defect Inspection
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US11860554utility2024
Object Positioner, Method for Correcting the Shape of an Object, Lithographic Apparatus, Object Inspection Apparatus, Device Manufacturing Method
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US11860553utility2024
Assembly Comprising a Cryostat and Layer of Superconducting Coils and Motor System Provided with Such an Assembly
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US11860552utility2024
Stage System, Lithographic Apparatus, Method for Positioning and Device Manufacturing Method
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US11860549utility2024
Method for Controlling a Manufacturing Apparatus and Associated Apparatuses
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US11860548utility2024
Method for Characterizing a Manufacturing Process of Semiconductor Devices
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US11860546utility2024
Fluid Handling Structure for Lithographic Apparatus
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US11856681utility2023
Target Delivery System
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US11854765utility2023
Multiple Charged-particle Beam Apparatus and Methods
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US11846889utility2023
Method and Apparatus for Diffraction Pattern Guided Source Mask Optimization
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US11846867utility2023
Hollow-core Photonic Crystal Fiber Based Broadband Radiation Generator
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US11846887utility2023
Prolonging Optical Element Lifetime in an EUV Lithography System
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US11847570utility2023
Deep Learning for Semantic Segmentation of Pattern
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US11842420utility2023
Method and Apparatus for Adaptive Alignment
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US11843069utility2023
Semiconductor Detector and Method of Fabricating Same
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US11835862utility2023
Model for Calculating a Stochastic Variation in an Arbitrary Pattern
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