Patents/Assignees

ASML Netherlands B.V.

728 patents in portfolio

US12139436utility2024
Droplet Generator Nozzle
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US12140875utility2024
Metrology Measurement Method and Apparatus
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US12140873utility2024
Positioning Device
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US12142453utility2024
Multi-beam Inspection Apparatus
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US12142535utility2024
Method and Apparatus to Determine a Patterning Process Parameter Using a Unit Cell Having Geometric Symmetry
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US12142456utility2024
Self-differential Confocal Tilt Sensor for Measuring Level Variation in Charged Particle Beam System
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US12142455utility2024
Charged Particle Beam Apparatus with Multiple Detectors and Methods for Imaging
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US12142451utility2024
System for Inspecting and Grounding a Mask in a Charged Particle System
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US12141507utility2024
Process Window Optimizer
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US12130538utility2024
Broadband Radiation Generation in Hollow-core Fibers
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US12130468utility2024
Method of Manufacture of a Capillary for a Hollow-core Photonic Crystal Fiber
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US12130246utility2024
Method for Overlay Metrology and Apparatus Thereof
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US12124179utility2024
Method of Wafer Alignment Using at Resolution Metrology on Product Features
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US12124177utility2024
Overlay Measurement System Using Lock-in Amplifier Technique
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US12125671utility2024
Multi-source Charged Particle Illumination Apparatus
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US12124176utility2024
Inspection Apparatus
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US12125669utility2024
Thermal-aided Inspection by Advanced Charge Controller Module in a Charged Particle System
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US12124174utility2024
Metrology Method and Apparatus, Computer Program and Lithographic System
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US12117721utility2024
Lithographic Apparatus and Device Manufacturing Method
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US12117726utility2024
Pellicle and Pellicle Assembly
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