Patents/Assignees

ASML Netherlands B.V. & ASML Holding N.V.

4 patents in portfolio

US12461448utility2025
Multi-channel Light Source for Projection Optics Heating
0 cites
US12422758utility2025
Lithographic Apparatus, Temperature Sensor, and Fiber Bragg Grating Sensor
0 cites
US12287591utility2025
Lithographic Apparatus, Metrology Systems, and Methods Thereof
0 cites
US12124173utility2024
Lithographic Apparatus, Metrology Systems, Illumination Sources and Methods Thereof
0 cites