- US12235595utility2025Systems for Cleaning a Portion of a Lithography Apparatus0 cites
- US12216414utility2025Self-referencing Integrated Alignment Sensor0 cites
- US12189310utility2025Systems and Methods for Manufacturing a Double-sided Electrostatic Clamp0 cites
- US12174552utility2024Lithographic Apparatus and Electrostatic Clamp Designs0 cites
- US12140870utility2024Double-scanning Opto-mechanical Configurations to Improve Throughput of Particle Inspection Systems0 cites
- US12140872utility2024Optical Designs of Miniaturized Overlay Measurement System0 cites
- US12135505utility2024Spectrometric Metrology Systems Based on Multimode Interference and Lithographic Apparatus0 cites
- US12124172utility2024Lithographic Apparatus and Ultraviolet Radiation Control System0 cites
- US12117737utility2024Apparatus and Method for Cleaning a Support Structure in a Lithographic System0 cites
- US12111581utility2024Method to Manufacture Nano Ridges in Hard Ceramic Coatings0 cites
- US12066758utility2024Pellicle and Pellicle Assembly0 cites
- US11994808utility2024Lithographic Apparatus, Metrology Systems, Phased Array Illumination Sources and Methods Thereof0 cites
- US11982946utility2024Metrology Targets0 cites
- US11971665utility2024Wafer Alignment Using Form Birefringence of Targets or Product0 cites
- US11966169utility2024Lithographic Apparatus, Metrology Systems, Phased Array Illumination Sources and Methods Thereof0 cites
- US11960216utility2024Invariable Magnification Multilevel Optical Device with Telecentric Converter0 cites
- US11953838utility2024Lithography Support Cleaning with Cleaning Substrate Having Controlled Geometry and Composition0 cites
- US11927889utility2024Intermediate Layer for Mechanical Interface0 cites
- US11906907utility2024Apparatus and Method for Determining a Condition Associated with a Pellicle0 cites
- US11899380utility2024Apparatus for and Method of Sensing Alignment Marks0 cites