Patents/Assignees

ASML Holding N.V. & ASML Netherlands B.V.

4 patents in portfolio

US12504699utility2025
Charge Dissipative Reticle Table Cleaning Reticle
0 cites
US12306541utility2025
Lithographic Apparatus, Metrology Systems, Illumination Switches and Methods Thereof
0 cites
US12158705utility2024
End-of-life Monitoring of Dynamic Gas Lock Membranes and Pupil Facet Mirrors and Detection of Membrane Rupture in Lithographic Apparatuses
0 cites
US12066762utility2024
On Chip Sensor for Wafer Overlay Measurement
0 cites