Patents/Assignees

ASM IP Holding B.V.

539 patents in portfolio

US12577638utility2026
Castable Aluminum Alloys for Wafer Handling Chambers in Semiconductor Processing Systems
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US12577659utility2026
Methods and Assemblies for Selectively Depositing Molybdenum
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US12578184utility2026
Endpoint Detection Method for Chamber Component Refurbishment
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US12571091utility2026
Method for Forming Carbon Film and Film Forming Apparatus
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US12571093utility2026
Selective Deposition of Silicon Oxide on Metal Surfaces
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US12571095utility2026
Low Temperature Flowable Vanadium Oxide Gap Fill
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US12572164utility2026
Dual Model-based Temperature Controller
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US12575376utility2026
Systems and Apparatus for a Lift Pin Assembly
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US12575381utility2026
Method of Forming Silicon Within a Gap on a Surface of a Substrate
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US12565466utility2026
Synthesis and Use of Precursors for Vapor Deposition of Tungsten Containing Thin Films
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US12568779utility2026
Method of Forming Treated Silicon-carbon Material
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US12564871utility2026
Cleaning Fixture for Showerhead Assemblies
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US12558661utility2026
Vapor Delivery Apparatus, Associated Vapor Phase Reactor and Methods of Use
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US12559837utility2026
Method for Depositing Boron Nitride
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US12563983utility2026
Method of Forming Structures Including a Vanadium or Indium Layer
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US12563998utility2026
Apparatus and Methods for Cooling Reaction Chambers in Semiconductor Processing Systems
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US12564001utility2026
Dual Pyrometer Systems for Substrate Temperature Control During Film Deposition
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US12554273utility2026
Flow Control Arrangements with Flow Switches, Semiconductor Processing Systems, and Flow Control Methods
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US12553523utility2026
Thermal Break Between a Substrate Processing Chamber and Substrate Handling Chamber
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US12546008utility2026
Process Chamber Volume Adjustment
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