Patents/Assignees

ASM IP Holding B.V.

539 patents in portfolio

US12195852utility2025
Substrate Processing Apparatus with an Injector
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US12183602utility2024
Substrate Processing Apparatus for Processing Substrates
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US12183546utility2024
Substrate Processing Apparatus
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US12173404utility2024
Method of Depositing Epitaxial Material, Structure Formed Using the Method, and System for Performing the Method
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US12173402utility2024
Method of Forming a Transition Metal Containing Film on a Substrate by a Cyclical Deposition Process, a Method for Supplying a Transition Metal Halide Compound to a Reaction Chamber, and Related Vapor Deposition Apparatus
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US12176243utility2024
Method and Apparatus for Filling a Recess Formed Within a Substrate Surface
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US12173400utility2024
Substrate Processing Device
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US12169361utility2024
Substrate Processing Apparatus and Method
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US12170197utility2024
Selective Passivation and Selective Deposition
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US12163225utility2024
Temperature-controlled Chemical Delivery System and Reactor System Including Same
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US12166099utility2024
Methods for Forming a Semiconductor Device Structure and Related Semiconductor Device Structures
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US12163227utility2024
Film Deposition Systems and Methods
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US12159788utility2024
Method of Forming Structures for Threshold Voltage Control
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US12154824utility2024
Substrate Processing Method
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US12154785utility2024
Deposition of Oxide Thin Films
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US12148609utility2024
Silicon Oxide Deposition Method
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US12142479utility2024
Formation of Siocn Thin Films
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US12138654utility2024
Vapor Phase Deposition of Organic Films
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US12134108utility2024
Vapor Phase Deposition of Organic Films
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US12136552utility2024
Toposelective Vapor Deposition Using an Inhibitor
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