- US12011731utility2024Faceplate Tensioning Method and Apparatus to Prevent Droop0 cites
- US12011801utility2024Printing a Chemical Mechanical Polishing Pad0 cites
- US12012653utility2024Cleaning Assemblies for Substrate Processing Chambers0 cites
- US12013291utility2024Advanced Temperature Monitoring System with Expandable Modular Layout Design0 cites
- US12013566utility2024Method for Manufacturing Optical Device Structures0 cites
- US12013633utility2024Photomask Cleaning0 cites
- US12014898utility2024Active Temperature Control for RF Window in Immersed Antenna Source0 cites
- US12014902utility2024System and Method of Cleaning Process Chamber Components0 cites
- US12014906utility2024High Temperature Detachable Very High Frequency (VHF) Electrostatic Chuck (ESC) for PVD Chamber0 cites
- US12014925utility2024Metal-doped Carbon Hardmasks0 cites
- US12014927utility2024Highly Etch Selective Amorphous Carbon Film0 cites
- US12014944utility2024Mapping of a Replacement Parts Storage Container0 cites
- US12014956utility2024Tungsten Gapfill Using Molybdenum Co-flow0 cites
- US12015042utility2024Structure and Material Engineering Methods for Optoelectronic Devices Signal to Noise Ratio Enhancement0 cites
- US12009236utility2024Sensors and System for In-situ Edge Ring Erosion Monitor0 cites
- US12005145utility2024Metal Oxide Encapsulated Drug Compositions and Methods of Preparing the Same0 cites
- US12005446utility2024High Throughput Compact Microfluidic Cell Counter0 cites
- US12006442utility2024Additive Manufacturing of Polishing Pads0 cites
- US12007334utility2024Compact Apparatus for Batch Vial Inspection0 cites