- US12510878utility2025Physically-informed Multi-system Hardware Operating Windows0 cites
- US12510707utility2025Total or Local Thickness Variation for Optical Devices0 cites
- US12509762utility2025Oxidation Barriers with CVD Soak Processes0 cites
- US12509756utility2025Reduced Substrate Process Chamber Cavity Volume0 cites
- US12504269utility2025Self-aligning Interferometric End Point Housing0 cites
- US12506024utility2025Method and Mechanism for Contact-free Process Chamber Characterization0 cites
- US12506020utility2025Substrate Processing Module and Method of Moving a Workpiece0 cites
- US12505982utility2025Method and Apparatus for Digital Control of Ion Energy Distribution in a Plasma0 cites
- US12505539utility2025Cell Body Segmentation Using Machine Learning0 cites
- US12504726utility2025Determining Equipment Constant Updates by Machine Learning0 cites
- US12504364utility2025In-situ Monitoring to Label Training Spectra for Machine Learning System for Spectrographic Monitoring0 cites
- US12503766utility2025Vapor Concentration Sensors for Process Chambers0 cites
- US12502748utility2025Control Substrate Polishing Using Constrained Cost Function0 cites
- US12502693utility2025Backflush Seal Cleaning Apparatus0 cites
- USD1107089design2025Substrate-handling Robot End Effector0 cites
- US12500094utility2025Modular Fluid Delivery Assembly0 cites
- US12500080utility2025Systems and Methods for Depositing Low-k Dielectric Films0 cites
- US12498705utility2025Chamber Matching by Equipment Constant Updates0 cites
- US12497697utility2025Layer with Discrete Islands Formed on a Substrate Support0 cites