- US11585764utility2023Multi-level RF Pulse Monitoring and RF Pulsing Parameter Optimization at a Manufacturing System0 cites
- US11586067utility2023Structure and Method of Advanced Lcos Back-plane Having Robust Pixel via Metallization0 cites
- US11586160utility2023Reducing Substrate Surface Scratching Using Machine Learning0 cites
- US11586573utility2023Distributed Input/output (IO) Control and Interlock Ring Architecture0 cites
- US11586789utility2023Machine Learning Based Smart Process Recipe Builder to Improve Azimuthal Flow and Thickness Uniformity0 cites
- US11586794utility2023Semiconductor Processing Tools with Improved Performance by Use of Hybrid Learning Models0 cites
- US11587873utility2023Binary Metal Liner Layers0 cites
- US11587930utility20233-D DRAM Structures and Methods of Manufacture0 cites
- US11587936utility2023Low Resistivity DRAM Buried Word Line Stack0 cites
- US11588209utility2023Ultra-thin Ceramic Coating on Separator for Batteries0 cites
- US11589474utility2023Diagnostic Disc with a High Vacuum and Temperature Tolerant Power Source0 cites
- US11581408utility2023Method and Apparatus for Selective Nitridation Process0 cites
- US11577356utility2023Machine Vision as Input to a CMP Process Control Algorithm0 cites
- US11577358utility2023Gas Entrainment During Jetting of Fluid for Temperature Control in Chemical Mechanical Polishing0 cites
- US11577361utility2023Retaining Ring with Shaped Surface and Method of Forming0 cites
- US11577362utility2023Pad Conditioner Cut Rate Monitoring0 cites
- US11577946utility2023Fail-safe Pneumatic Lift System0 cites
- US11578004utility2023Methods and Apparatus for Depositing Materials on a Continuous Substrate0 cites
- US11578398utility2023Plasma Spray Coating Design Using Phase and Stress Control0 cites
- US11578406utility2023Ampoule for a Semiconductor Manufacturing Precursor0 cites