- US11759954utility2023Calibration of an Electronics Processing System0 cites
- US11759911utility2023Carrier Head with Segmented Substrate Chuck0 cites
- US11764058utility2023Three-color 3D DRAM Stack and Methods of Making0 cites
- US11753726utility2023Protection of Components from Corrosion0 cites
- USD0998575design2023Collimator for Use in a Physical Vapor Deposition (PVD) Chamber0 cites
- US11752589utility2023Chemical Mechanical Polishing Temperature Scanning Apparatus for Temperature Control0 cites
- US11753715utility2023Apparatus and Methods for Controlling Concentration of Precursors to Processing Chamber0 cites
- US11753727utility2023Protection of Components from Corrosion0 cites
- US11754917utility2023Extreme Ultraviolet Mask Blank with Multilayer Absorber and Method of Manufacture0 cites
- US11754919utility2023Lithography Method to Form Structures with Slanted Angle0 cites
- US11756816utility2023Carrier FOUP and a Method of Placing a Carrier0 cites
- US11756784utility2023Methods for Aluminum Oxide Surface Recovery0 cites
- US11756785utility2023Molecular Layer Deposition Contact Landing Protection for 3D NAND0 cites
- US11756796utility2023Techniques for Improved Low Dielectric Constant Film Processing0 cites
- US11756803utility2023Gas Delivery System for High Pressure Processing Chamber0 cites
- US11756804utility2023Platen Shield Cleaning System0 cites
- US11756819utility2023Methods and Apparatus for Minimizing Substrate Backside Damage0 cites
- US11756828utility2023Cluster Processing System for Forming a Transition Metal Material0 cites
- US11756925utility2023Methods and Apparatus for Vacuum Processing a Substrate0 cites
- US11756982utility2023Methods of Parallel Transfer of Micro-devices Using Mask Layer0 cites