Patents/Assignees

Air Water Inc.

7 patents in portfolio

US12571094utility2026
Method of Processing Substrate, Substrate Processing Apparatus, and Recording Medium
0 cites
US12490486utility2025
Compound Semiconductor Substrate and Method for Manufacturing Compound Semiconductor Substrate
0 cites
US12230679utility2025
Compound Semiconductor Substrate Including Nitride Semiconductor Layer Having Varying Threading Dislocation Densities
0 cites
US12129973utility2024
Liquefied Fluid Supply System and Liquefied Fluid-spraying Apparatus
0 cites
US12087852utility2024
Compound Semiconductor Device, Compound Semiconductor Substrate, and Method for Manufacturing Compound Semiconductor Device
0 cites
US12001136utility2024
Pellicle Intermediary Body, Pellicle, Method for Manufacturing of Pellicle Intermediary Body, and Pellicle Manufacturing Method
0 cites
US11626283utility2023
Compound Semiconductor Substrate, a Pellicle Film, and a Method for Manufacturing a Compound Semiconductor Substrate
0 cites