Patents/Assignees

Advanced Ion Beam Technology, Inc.

3 patents in portfolio

US12170182utility2024
Ribbon Beam Angle Adjustment in an Ion Implantation System
0 cites
US11942343utility2024
Wafer Temperature Measurement in an Ion Implantation System
0 cites
US11600464utility2023
Apparatus and Method for Reduction of Particle Contamination by Bias Voltage
0 cites