Patents/Assignees

ACM RESEARCH (SHANGHAI), Inc.

29 patents in portfolio

US12610777utility2026
Substrate Processing Apparatus
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US12573019utility2026
Electroplating Chamber Leakage Plating Warning Method and System
0 cites
US12564026utility2026
Method of Removing Barrier Layer
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US12544807utility2026
Wafer Cleaning Apparatus
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US12494360utility2025
Apparatus and Method for Cleaning Semiconductor Wafers
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US12486590utility2025
Substrate Processing Method
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US12482697utility2025
Substrate Supporting Apparatus
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US12467156utility2025
Plating Apparatus and Plating Method
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US12334367utility2025
Method and Apparatus for Removing Particles or Photoresist on Substrates
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US12186684utility2025
Method and Apparatus for Cleaning Substrates Using High Temperature Chemicals and Ultrasonic Device
0 cites
US12111575utility2024
Coater with Automatic Cleaning Function and Coater Automatic Cleaning Method
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US12100586utility2024
Substrate Cleaning Method and Apparatus
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US12068149utility2024
Apparatus and Method for Cleaning Semiconductor Wafers
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US12062556utility2024
Methods and Apparatus for Cleaning Semiconductor Wafers
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US11967497utility2024
Methods and Apparatus for Cleaning Semiconductor Wafers
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US11955328utility2024
Method and Apparatus for Cleaning Semiconductor Wafer
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US11925881utility2024
Method and Apparatus for Cleaning Substrates Using High Temperature Chemicals and Ultrasonic Device
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US11926920utility2024
Electroplating Apparatus and Electroplating Method
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US11911807utility2024
Method and Apparatus for Cleaning Substrates
0 cites
US11911808utility2024
System for Cleaning Semiconductor Wafers
0 cites

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