Heat Insulation Pedestal of a Semiconductor Manufacturing Apparatus

FIG. 1 is a rear, top and right side perspective view of a heat insulation pedestal of a semiconductor manufacturing apparatus, showing my new design; FIG. 2 is a front elevational view thereof; FIG. 3 is a rear elevational view thereof; FIG. 4 is a right side elevational view thereof; FIG. 5 is a left side elevational view thereof; FIG. 6 is a top plan view thereof; FIG. 7 is a bottom plan view thereof; and, FIG. 8 is a cross sectional view taken along line 8 - 8 in FIG. 2 .