Mainframe of Dual-robot Substrate Processing System

FIG. 1 is a top perspective view of a mainframe of dual-robot substrate processing system of the present design.

FIG. 2 is a left side elevational view thereof.

FIG. 3 is a right-side elevational view thereof.

FIG. 4 is a front elevational view thereof.

FIG. 5 is a rear elevational view thereof.

FIG. 6 is a top plan view thereof.

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a top, perspective view thereof, showing unclaimed components attached thereto.

The broken lines shown in the figures are directed to unclaimed portions of the mainframe and/or unclaimed components attached to the mainframe that are for illustrative purposes only and form no part of the claimed design.