Substrate Processing Apparatus

FIG. 1 is a top, front, and left side perspective view of a substrate processing apparatus, showing our new design;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a top view thereof;

FIG. 5 is a bottom view thereof;

FIG. 6 is a right side view thereof;

FIG. 7 is a left side view thereof;

FIG. 8 is a cross-sectional perspective view taken along line I-I of FIG. 2 , line II-II of FIG. 4 , and lines III-III and IV-IV of FIG. 7 , with an internal mechanism being omitted;

FIG. 9 is a cross-sectional perspective view taken along line I-I of FIG. 2 , line II-II of FIG. 4 , and lines III-III and IV-IV of FIG. 7 , with a lid closed, and with the internal mechanism being omitted; and,

FIG. 10 is a cross-sectional view taken along line III-III of FIG. 7 , with the internal mechanism being omitted.

The dashed broken lines in the figures show portions of the substrate processing apparatus that form no part of the claimed design. The dot-dashed broken lines in the figures represent boundaries and form no part of the claimed design.