Electrode Plate for Semiconductor Manufacturing Apparatus

FIG. 1 is a top perspective view of an electrode plate for semiconductor manufacturing apparatus, showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a front side elevational view thereof;

FIG. 6 is a back side elevational view thereof;

FIG. 7 is a right side elevational view thereof;

FIG. 8 is a left side elevational view thereof;

FIG. 9 is an enlarged portion view taken from encircled portion labeled, “ 9 ,” in FIG. 1 ;

FIG. 10 is an enlarged portion view taken from encircled portion labeled, “ 10 ,” in FIG. 3 ; and,

FIG. 11 is a cross-sectional view taken along lines 11 - 11 in FIG. 3 .

The dot-dashed lines illustrate the boundary of the enlarged portion views of FIGS. 9 and 10 in FIGS. 1 , 3 , 9 , and 10 and form no part of the claimed design.