Chamber Wall Liner for a Semiconductor Manufacturing Apparatus
USD1034493No. D 1,034,493designGranted 7/9/2024
Claims (1)
Claim 1 (Independent)
The ornamental design for a chamber wall liner for a semiconductor manufacturing apparatus, as shown and described.
Full Description
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FIG. 1 is a perspective view of a chamber wall liner for a semiconductor manufacturing apparatus, showing our new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a left side view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a top plan view thereof; and,
FIG. 7 is a bottom plan view thereof.
Citations
This patent cites (23)
- USD491963
- USD665491
- USD711331
- USD716239
- USD716240
- USD717746
- USD802545
- USD876504
- USD888903
- USD891382
- USD895076
- USD933725
- USD933726
- USD934315
- USD941371
- USD941372
- USD942516
- USD979524
- US20070113783
- US20080041820
- US20150190835
- US20200090915
- USD215697
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