Claims (1)
Claim 1 (Independent)
I claim the ornamental design for a MEMS mass flow controller, substantially as shown and described.
Full Description
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FIG. 1 is a front right perspective view of a MEMS mass flow controller in accordance with the present design.
FIG. 2 is a front view for the MEMS mass flow controller.
FIG. 3 is a rear view thereof.
FIG. 4 is a left side plan view thereof.
FIG. 5 is a right side plan view thereof.
FIG. 6 is a top view thereof; and,
FIG. 7 is a bottom view thereof.
Broken lines are used to show environment and boundaries that form no part of the claimed design.
Citations
This patent cites (10)
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