Confinement Plate for a Substrate Processing Chamber

FIG. 1 is a top isometric view of a confinement plate for a substrate processing chamber, showing my new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a front elevation view thereof;

FIG. 5 is a rear elevation view thereof;

FIG. 6 is a right side elevation view thereof;

FIG. 7 is a left side elevation view thereof; and,

FIG. 8 is an enlarged cross-sectional view taken along line 8 - 8 of FIG. 2 .

The dashed lines in FIGS. 1 - 8 represent unclaimed environment forming no part of the claimed design.

Citations

Claims (1)